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SCREEN – Innovation Partner for the Semiconductor Industry


Date: 14 November 2017

Time: 13:00–17:00

Location: TechARENA 2

Sponsored by:



FDSOI Activities on 300mm

Enhanced and New Equipment for 200mm

SCREEN R&D Activities in Europe


SCREEN Semiconductor Solutions is a world class semiconductor production equipment company for advanced cleaning, lithography and annealing technology.

Formerly known as DAINIPPON SCREEN we have more than 25 years expertise in supporting the European semiconductor market.

With our various collaboration, JDP and R&D activities in Europe we are a strong innovation partner for the industry and we will present in the TechARENA 2 afternoon session an overview on our R&D and FDSOI engagement as well as new equipment platforms and enhancements for 200mm.


CHARIMAN:  Dr. Olivier Vatel, CTO, SCREEN Semiconductor Solutions Co., Ltd.




13h00 – 13h05

Welcome – Dr. Olivier Vatel

13h05 – 14h00

1. FDSOI Activities on 300mm                                                      

1.2 SOITEC – FDSOI wafer cleaning presentation

1.3 GLOBALFOUNDRIES – Interface engineering challenges for 22FDSOI

14h00 – 15h45

2. SCREEN R&D Activities in Europe                                            

2.1 IMEC – Advanced wet processing for next generation FinFET/GAA architectures

2.2 CEA-Leti – Laser anneal presentation

2.2 Yole Developpement – Laser Technologies for Semiconductor Manufacturing Processes

2.3 CEA-Leti – Lithography DSA presentation

15h45 – 17h00

3. Enhanced and New Equipment for 200mm and beyond

3.1 SCREEN - DUO Coat/Develop track for new high throughput scanner

3.2 SCREEN - Clustered metrology: Patterned wafer inspection and thickness measurement

3.3 SCREEN – New Frontier products presentation




Register Button 

No pre-registration required but you must register as a visitor, in order to gain access to the venue. We recommend to arrive early as seating is limited.


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