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Standards Technical Education Program (STEP) on SEMI S2 EHS Guideline for Semiconductor Manufacturing Equipment and SEMI S8 Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment
Thursday, 9 October 2008, 08:30–12:30
New Messe Stuttgart Conference Center (ICS), Germany
In conjunction with SEMICON Europa 2008
Session Chairs
Mark Harralson, Intel
Saranpal (Sunny) Rai, Intertek
Bert Planting, ASML
Description
As far as ergonomics risks are concerned, the majority of design issues today relate to maintenance and service activities and the most prevalent concern in these types of tasks are the handling of heavy equipment components. The training will cover the three most common MMH assessment methods expected to be performed as part of an S8 assessment, and will touch on recommended risk characterization for non-compliant tasks.
SEMI S2 is the most widely accepted basic industry safety guidelines used to design the Semiconductor Manufacturing Equipment (SME). It consists of specific requirements for several types of hazards associated with SME, including Electrical, Mechanical, Chemical, Lasers and Radiations. As the basic design guide for the SME it also has significant impact on the regulatory requirements around the world. This course will provide you with the basic understanding of the SEMI S2 requirements and their relationship to other regulatory standards around the world.
Agenda
08:30
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Introduction to the program
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Bert Planting, ASML - BIOGRAPHY
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08:40
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Session on SEMI S8
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Mark Harralson, Intel - BIOGRAPHY
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SEMI S8 Introduction:
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What MMH activities have to be assessed?
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Overview of standard MMH analysis tools.
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08:50
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1991 NIOSH equation:
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Data collection and analysis
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Example problem
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09:20
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Biomechanical analysis:
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Data collection and analysis
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Example problem
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09:50
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Psychophysical analysis:
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Data collection and analysis
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Example problem
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10:10
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Risk characterization of non-compliant situations
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Future S8 enhancements
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Recommended references
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10:20
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Coffee Break
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10:40
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Session on SEMI S2
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Saranpal Rai, Intertek - BIOGRAPHY
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SEMI S2 Introduction:
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SEMI S2 and other related SEMI S Documents
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SEMI S2 and its relation to regulatory requirements
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10:50
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Design for Safety: Electro-mechanical Hazards
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Electrical Design, Interlocks and Emergency Shutdown,
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Robotics & Automation
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11:20
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Design for Safety: Physical Hazards
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Ionizing/Non-Ionizing Radiation, Lasers and Noise
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Earthquake, Labeling & Documentation
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11:40
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Design for Safety: Chemical Hazards
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Chemicals, Ventilation and Environmental
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12:00
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Design for Fire Safety: Fire Protection and Heated Chemical Baths
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12:10
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Q&A Session
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Moderator: Bert Planting, ASML - BIOGRAPHY
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12:30
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Closure of Program
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Who Should Attend
Individuals involved in the design or EHS evaluation of semiconductor manufacturing equipment.
What is a STEP and why should I attend?
A Standards Technical Education Program (STEP) is a technical program focused on one or several SEMI International Standards. SEMI produces STEPs to communicate information about newly published or revised standards, or critical documents under development, that are expected to have a profound impact on industry operations. It is common for members of the originating standards task force to serve as presenters. Attending a STEP will give you the opportunity to learn more about the application of a critical new standard which impacts your manufacturing site or affects your supplier-customer relationships. This technical education program will teach you how to implement new technical information into your everyday fab operations, which may help you and your company to improve your product and processes considerably.
Price
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Valid through 26 September
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Beginning 27 September
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SEMI Members
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€150
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€250
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Non-Members
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€200
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€250
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