Secondary Equipment, Services and Technology Session - Abstracts and Biographies

 

Introduction to SEMI SEA

Eduard Hoeberichts, Chief Executive Officer, Chairman of the SEMI SEA (Secondary Equipment and Applications)

Biography

Eduard Hoeberichts is founder and CEO of Simax Services, a company that focuses on engineering services for lithography, especially for the support of equipment in existing fabs and the use of lithography for “More than Moore” Applications. Simax has operations in Europe, the US and Asia.From 1996-2007 Eduard worked for ASML, as Senior Vice President responsible for the Special Applications Division.Eduard holds an MA degree in Economics and an MBA.

 

SCREEN & SOKUDO - OEM Equipment and Parts Remanufacturing and Refurbishment

Joerg Gundrum, Product Engineer
Dainippon Screen Deutschland

Biography

Joerg Gundrum is Product Engineer of Dainippon Screen Deutschland GmbH,
responsible for Dainippon Screen Track products.
In July 2011 he returned from a 3,5 years expatriate assignment to Screen/Sokudo in Japan.
During his tenure he was responsible for factory quality assurance to world wide customers.
He serves the Semiconductor-Industry for 11 years.

Abstract

Dainippon Screen Munich Refurbishment Center provides remanufacturing and refurbishment
service for pre-owned coating-, developing- and cleaning equipment.
http://www.screen-dsd.de/en.html
 
• Spare part repair and re-manufacturing
• Transport robot overhaul
• Customized solutions
• In-house developments
• CE marking
• Onsite installation 
 

Risk Management in Installed Base Tool Recycling for Inspection/Metrology

Julia Svirchevski, Director of Marketing KT Certified Division
KLA-Tencor

Biography

Julia Svirchevski has been in marketing director position at KLA-Tencor Company since 2006 responsible for strategic planning process for revenue growth, product portfolio configuration management, product life cycle transitions, and demo lab coordination. Prior to joining KLA-Tencor, Julia Svirchevski held various management positions at Novellus Systems and Applied Materials.
Julia Svirchevski holds MBA degree in Marketing and M.S. in Chemical Engineering. Also, Julia holds multiple patents, published many Engineering/Technology papers, and made numerous presentations at International symposiums, conferences and technical seminars.

Abstract

The advancement of semiconductor fabrication has been accompanied and made possible by the increased use of ever more capable inspection and metrology (“I/M”) tools used in-line in fabs. All too frequently, device manufacturers view and treat their I/M tools in the same way as process tools, forgetting that I/M tools contain ultra-sensitive instrumentation that require special care. This presentation will identify the 7 critical points of risk management for device makers who are contemplating the purchase of previously-used I/M tools, with ideas for risk mitigation.
As fabs, even those operating at mature technology nodes, add inspection and metrology operations to their process flow, they can first look to their existing I/M tool installed base for upgrade and trade-in opportunities. This step can conserve cash and extract the greatest value from past investments.

Life Cycle Management

 
Marcel Kemp, Director Europe Accounts
ASML

Biography

Bachelor in Physics (HTS-Natuurkunde in Eindhoven)
Work Experience :
22 years experience in semiconductor industry :
2 year in Philips Research  (III-V materials, etching solid state lasers)
20 years ASML (Manufacturing, R&D, Sales)
11 years Sales for ASML (4 years in Singapore)
Current position : ASML Director Europe Accounts

Abstract

ASML is the world's leading provider of lithography systems for the semiconductor industry, manufacturing complex machines that are critical to the production of integrated circuits or microchips. ASML designs, develops, integrates, markets and services these advanced systems, which continue to help our customers reduce the size and increase the functionality of microchips, and consumer electronic equipment.  ASML continuous to put effort in it's install base to extend it's life time for existing customers in mature markets and for new customers in upcoming markets.
 
 
 

Services and Equipments in the field of Ion Implantation

Cyril Bellion, Equipment and Sevices Sales Manager
IBS

Biography

Initially a process engineer for a soap and washing liquor company, he entered the semiconductor industry in 1995 and spent 9 years working for Applied Materials, focusing on DCVD technology mainly for the STMicroelectronics account.
Since 2005, he works as a sales manager for IBS France, and is in charge of the business development of the equipments and services division for ion implantation technology.

Abstract 

For 25 years IBS has provided innovative leadership in the field of Ion Implantation - developing a wide range of products and services tailored to meet the continuously evolving needs of its customers.
As the historical cornerstone and the core competence of IBS, Ion Implantation Service remains our answers for fabs and research facilities outsourcing needs. This presentation will describe how IBS’s continuous investment in process and equipment development translate in terms of innovative implantation services and advanced equipment remanufacturing programs.
 

Micro- and Nanofabrication at DTU Danchip

 
Jörg Hübner, Director
DTU Danchip

Biography

Jörg Hübner received his MSc. E.E from the University of Stuttgart, Germany, a Ph.D.in Photonics from the Technical University of Denmark in 1998 and an executive leadership education from Harvard Business School in 2009. During his Ph.D., as well as in his following academic positions (associate professor) he worked as consultant for several start-up companies, transferring technology from academic environments to industry. In 2001 he joined Sparkolor Corporation, a Silicon Valley start-up company as Senior Engineering Manager. In 2005 he became  Deputy Director at the Department of Micro- and Nanotechnology at the Technical University of Denmark a position he held until 2009 when he was appointed Director of DTU Danchip, the National Center for Micro-and Nanofabrication in Denmark.

Abstract


DTU Danchip is the National Center for Micro and Nanofabrication in Denmark. We drive a 1350m2 open access cleanroom facility (class 1000 - 10) and are part of the Technical University of Denmark, located in the Copenhagen area.
Increasing complexity and demand for smaller structures and devices prompt a need for sharing cost and expertise in order to develop and fabricate micro and nano devices. In addition the transfer from development in a lab to production in a fab is time consuming, expensive and reduces flexibility with respect to iterations and bug fixes. At DTU Danchip we therefore offer a complete pathway from R&D to small scale production. We provide tools that are used in R&D but have the capacity for small scale production (e.g. cassette to cassette load silicon etch ICP, DUV stepper etc.). Furthermore we are very flexible and offer a wide range of materials, processes and services. DTU Danchip is ISO 9001 certified.
 
 


French National Nano-Fabrication Network RENATECH Provides an Infrastructure for Micro- and Nanotechnology Research available to all Qualified Users

Hugues Granier, Head of the technological platform
LAAS laboratory, RENATECH network

Biography

Born in 1966 Hugues Granier obtained its PhD in physics in 1995 in the Laboratory of Analysis and Architecture of Systems from French Scientific Research National Council (CNRS). Until 2007 he was a Research Engineer in the LAAS technological platform for micro and nano components fabrication as an Ion implantation and packaging expert. During this period he technically managed MOS fabrication processes. Today he is the manager of the technical staff in charge of this platform which is part of the French Renatech network.
 

Abstract

The program entitled "A national network of large technological facilities and Basic Technological Research (BTR) in micro and nanotechnologies" was launched in 2003.The set up of the network of large technological facilities is a far-reaching action of the direction of technology of French ministry of research. Its objective is to allow the national research organizations (CEA - Atomic Energy Commissariat, CNRS - National Centre for Scientific Research, Universities, etc. ...) to benefit of a competitive infrastructure at world level for carrying out R&D projects that require top level equipment in micro- and nano- technologies.
The RENATECH network is the CNRS part of this BTR program. In this presentation it will be presented the missions, the organization, the tools and the results of this RENATECH network. A specific highlight will be on the mutual interest of the network members and the equipment manufacturers or suppliers to develop jointly new processes and tools.