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Standards Workshops
The following Standards Workshops will be held in conjunction with SEMICON Europa 2008:
- Issues in Measuring Particles in semiconductor grade liquid chemicals and gases
The measurement of particles in process chemicals and gases creates a number of challenges for the semiconductor industry. For example, different instruments can often provide differing particle measurement data for similar chemical samples. In addition, the traditional calibration technique using latex spheres in water is likely to be inappropriate for use with typical semiconductor process chemicals, due to significantly differing refractive indices when comparing that of the liquid / particle system under investigation with that of the calibration mixture. Other issues include how to approach the correlation of particle measurement at the point of delivery, with particle size data appropriate to that at the point of use. Measurements are often taken offline but whether this is truly representative can be questionable. Issues also exist with gases and these will also be addressed.
This workshop offers a great opportunity for suppliers and end-users to come together to discuss many challenges and to consider potential solutions to address them.
- 7th Silicon Wafer Standards Workshop: “Silicon Wafer Trends and Requirements for Photovoltaic and Semiconductor Devices”
The workshop aims to inform the semiconductor community about future silicon wafer developments and potential standardization needs. Future technology generations will require increasingly perfect and optimized Si. wafers, challenging manufacturing processes as well as related metrology. This includes bare Si. wafers as well as wafers with functional layers. Standardization with respect to wafer parameters as well as metrology for establishing a common understanding and language regarding these issues would benefit the entire semiconductor industry.
This year’s workshop will be targeting both the semiconductor and photovoltaic industries. Semiconductor Industry Topics will include 450mm wafers status update, defects and particles on silicon wafer edge and an update on silicon on insulator (SOI) and strained-Si wafers. Photovoltaic Industry Topics will include Poly-Si versus refined Silicon, relationship of material properties and solar cell efficiency, advanced Solar Cells and Industry Standards activity update
- Waste Treatment in the Semiconductor and Photovoltaic industries
The main objective of this workshop is to bring together water companies, solar line providers for wafers, cells or/and thin film production, plus end customers with focus on wafer and cells/thin film production to discuss waste treatment challenges and opportunities. What is possible today from a technology perspective? What would the cost be to address such challenges? What is the price for recycled silicon? Consider the option of recycling and reuse of grade and scale? What is the outlook from the industry roadmap side? What are the local environmental challenges and issues? All these issues will be reviewed in this workshop.
- An introduction to EN IEC 62061 (Safety of Machinery - Functional safety of safety related electrical electronic and programmable electronic control systems) and EN ISO 13849 (Safety of Machinery - Safety Related parts of control systems - General Principles for design) Seminar – Hosted by Pilz Automation
Objective
The aim of this one day introductory level course is to equip delegates with information on the scope and main design requirements these standards promote and to give an appreciation of how to apply their principles.
Aims
By the end of the course delegates will have:
Been given an insight into the need for competence in the design of safety related control systems and how this should be addressed. Have gained an awareness of the key parts of the EN 62061 standard including SIL determination, diagnostic coverage and Common Cause Failures etc, for safety circuit designs and have also gained an understanding of the differences between BSEN 954-4 and pr EN ISO 13849-1 and the concepts which the new standard promotes including the determination and justification of performance levels rather than safety categories.
Audience
The course is aimed at managers, technicians and design engineers who have responsibilities for machinery safety related control systems.
High level schedule and registration:
Standards STEPs
A Standards Technical Education Program (STEP) is a technical program focused on one or several SEMI International Standards. SEMI produces STEPs to communicate information about newly published or revised standards, or critical documents under development, that are expected to have a profound impact on industry operations. It is common for members of the originating standards task force to serve as presenters. Attending a STEP will give you the opportunity to learn more about the application of a critical new standard which impacts your manufacturing site or affects your supplier-customer relationships. This technical education program will teach you how to implement new technical information into your everyday fab operations, which may help you and your company to improve your product and processes considerably.
The following STEPs will be held in conjunction with SEMICON Europa 2008:
- Recent advancements of Sensor Actuator Networks and their benefits for semiconductor applications
The key to the success of future semiconductor factories are factory productivity and efficient manufacturing production control. This Standards Technical Education Program (STEP) addresses the current SEMI global Information & Control (I&C) Standards activities that resulted in the specifications that enable and support connectivity to Ethernet-based and Fieldbus-based Sensor Actuator Networks for automation of equipment and facilities for Advanced Process Control, e-Manufacturing and e-Diagnostics. The program shows the consensus among IC manufacturers and suppliers on the new SEMI Standards that take advantage of the new upcoming communication technologies using new fieldbus technologies as well as Ethernet based communications, XML and web services. These standards improve connectivity for data collection, advance process control and provide self-descriptive information about the components being connected.
- SEMI Statistical Guidelines for Ship to Control
The new SEMI Standard: SEMI C64-0308 - SEMI Statistical Guidelines for Ship to Control, provides a set of guidelines for the quantitative determination of statistically derived limits from process data for the purpose of defining and maintaining Ship to Control (STC) limits. This guide applies to specified properties of specific products for which it is desired to use statistically derived control limits upon which customer notification, negotiated disposition of product, or statistical specifications can be based. SEMI C64-0308 provides both a standardized methodology for determining control limits and a methodology for determining which control limits need to be modified upon review. This methodology, if strictly applied as a statistical specification, prevents out of control materials from being shipped. This methodology provides the strictest control limits that are likely to prove cost effective with broad application of Ship to Control.
The Standards Technical Education Program (STEP) on Ship to Control will provide training with respect to: 1.The philosophy underlying the choice of statistical methodologies and associated rule sets utilized in the Ship to Control standard, 2.Understanding the key statistical methodologies in the standard, 3.Using a Windows based software tool to implement the standard – a FREE CD copy of the software will be given out to all participants of this training program.
- EHS Guidelines for Semiconductor Manufacturing Equipment - SEMI S2/S8
With the exception of some metrology equipment there are few design issues in equipment operation. The majority of design issues today relate to maintenance and service activities and the most prevalent concern in these types of tasks are the handling of heavy equipment components. The training will cover the three most common MMH assessment methods expected to be performed as part of an S8 assessment, and will touch on recommended risk characterization for non-compliant tasks.
SEMI S2 is the most widely accepted basic industry safety guidelines used to design the Semiconductor Manufacturing Equipment (SME). It consists of specific requirements for several types of hazards associated with SME, including Electrical, Mechanical, Chemical, Lasers and Radiations. As the basic design guide for the SME it also has significant impact on the regulatory requirements around the world. This course will provide you with the basic understanding of the SEMI S2 requirements and their relationship to other regulatory standards around the world.
Standards Meetings
The SEMI International Standards Program brings experts from the semiconductor, photovoltaic, MEMS, nanotechnology, flat panel display and related industries together to exchange ideas and work jointly to develop globally accepted technical standards. The results of this activity enable positive growth and economic benefit to the industries that SEMI serves. SEMI Standards contribute to faster commercialization and time-to-market, especially for new and emerging technologies. Please click on links below to view agenda details for each particular meeting.
The following Committees will meet during SEMICON Europa 2008:
- Equipment Automation: Agenda and Charter
- Facilities: Agenda and Charter
- Gases and Liquid Chemicals: Agenda and Charter
- MEMS: Agenda and Charter
- Silicon Wafers: Agenda and Charter
- Compound Semiconductors: Agenda and Charter
- EHS: Agenda and Charter
Other technical committees include:
- Micropatterning: Charter
- Facilities: Charter
- Photovoltaic: Agenda and Charter (to be held in conjunction with PV-SEC 2008)
Company Tours
If you are interested in attending these meetings and/or Workshops/STEPs:
- Registration opening soon
High Level Schedule:
Sponsorship Opportunities for Workshops and Other Details
For information on sponsorship opportunities, please contact:
Saviour Alfino
Tel: +32.2.289.66.12
salfino@semi.org
How can I join the SEMI Standards Program?
Participation in the SEMI International Standards Program is open to all; SEMI underwrites the costs of administering the program as a service to the industry. Meetings are open and anyone may attend. Members may join one or more technical committees as voting or non-voting members by filling out a simple application form. Visit us at www.semi.org/standards for more information.
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