Process Control, Automation and Software Session
Date: 13 October Time: 10:30 - 15:00 Location: TechARENA 2, Messe Dresden | ||
| The objective of the Presentation is to introduce engineers and technologists as well as managers into the importance of advance dequipment health monitoring, equipment (etch /deposition tools), process fundamentals as well as equipment interaction (conditioning, chamber matching,…). Further the talks should show the economic potential of process control strategies. Strategies to discover differences in tool behavior will be presented which is known as a main source of process faults. |
Session Agenda
| Chairman: | Klaus Kabitzsch, Professor, Dresden University of Technology |
Session 1: Equipment Health Monitoring | |
| 10:30 | Model Based Health Monitoring of Plasma Tools |
| Michael Klick, CEO, Plasmetrex | |
| 10:50 | Deployment of Advanced Process Control in LED Manufacturing |
| Heribert Zull, Senior Key Expert, Osram | |
| 11:10 | APC/AEC-Control Chambers by Monitoring Heating-lamp Current for Prevention of Metalcorrosion |
| Karsten Spinger, Process Engineer Plasma etch, Texas Instruments | |
Session 2: Virtual Metrology and Equipment Fault Prediction | |
| 13:00 | Predictive Process Control of Photoresist Thickness Variation |
| Gabriele Porri, Quality and Method Engineer, Micron | |
| 13:20 | Improvementof Prediction Performance in Virtual Metrology |
| Alexander Dementjev, Research Assistant, TU Dresden | |
| 13:40 | Optical Emission Spectroscopy (OES) for Leak Monitoring |
| Peter Brockhaus, Senior Manager, Infineon | |
Exhibitor Presentations | |
| Session-chair | Klaus Kabitzsch, Professor, Dresden University of Technology |
| 14:00 | Automation Migration: A Smooth Way to Move from Legacy Applications to Fully Integrated and Modular Automation Solutions |
| Hans Mayer, COO, Zentren für Neue Technologien | |
| 14:15 | Faster and More Efficient - SCRUM in Automation Software Projects |
Bjoern Bothur, Marketing and Sales Manager, SYSTEMA | |
| 14:30 | UDCS - An Ultra Damping Ceramics for Nano Processing Applications |
| Norbert Fischer, Managing Director, Noficon | |
| | |
| 14:45 | Go Green with Intelligent Tool and Facilities Control and Equipment Refurbishment for Legacy Semiconductor Manufacturing |
| Jochen Kinauer, Business Development/Director of Sales Semiconductor, AIS Automation | |
Who should attend?
Process Engineers, Maintenance Engineers, Equipment Engineers, FailureAnalysis Engineers, Process Integration Engineers, Managers, Equipment Supplier, Sensor Supplier, Process Software Supplier (MES, Process Control), R&D.
