450mm Session – Progress Review Date: 20 October, Messe Dresden Room: t.b.d.

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Organized by

12:30	Welcome
KEYNOTES
12:45	“A Consortium-based Approach to the 450mm Transition” Michael Liehr, Associate VP of Business, Alliances and Consortia, Professor, College of Nanoscale Science and Engineering, University at Albany, USA
13:15	“The 450mm Transition: Progress, Opportunities, and Challenges” Tom Jefferson, ISMI 450mm Program Manager, Intel
13:45	“EEMI 450 Initiative - a Chance for Europe” Bas van Nooten, Director European Cooperative Programs, ASMI, Netherlands
Session Technology and Manufacturing
14:15	“Title to be announced” Roger De Keersmaecker, Lode Lauwers, IMEC, Belgium
14.40	“PULSION a Scalable Plasma Immersion Ion Implantation System for Advanced Nodes” Laurent Roux, Frank Torregrosa, IBS, France
15.05	“Title to be announced” Peter Stallhofer, Corporate Vice President Research & Development, Siltronic, Germany
15:30	Coffee Break
Session Process and Metrology Equipment and Automation
16.00	“Challenges and Prospects in Semiconductor Material Metrology” Tibor Pavelka, President and CEO, Semilab, Hungary
16.25	“Migration to 450mm” Alain Jarre, CEO, RECIF Technologies, France
16.50	“450mm Wafer Carrier Design and Development” Poshin Lee, Director of Product Development, Entegris, Taiwan
17.15	“Requirements and First Specification for the Control Platform of a 450mm Cluster Tool and its Integration in into FAB IT Systems” Eckhard Schöbel, Mirko Schulze, AIS Dresden, Germany

Who should attend?
- Managers and senior professionals from equipment and materials industry
- Managers and scientists from the semiconductor industry
- Scientists and R&D managers
- Scientists from universities and research institutes

Price Information (19% VAT not included)	Until __October 1__	After __October 1__	__Onsite__	__
SEMI Members	€ 150	€ 200	€ 250
Non-Members	€ 200	€ 250	€ 250

Sponsorship – Industry Sponsors Wanted!

SEMICON Europa offers corporate sponsorship packages. If your company is interested, please review the Sponsorship Package or contact Beat Mueller, Director Member Relations at bmueller@semi.org Tel: +41 794656588.