MEMS/MST Exhibitor Presentations

Wednesday, 7 October, 14:00 – 16:15
Messe Dresden, Dresden, Germany
Technology Arena, Hall 1

Company Presentations

14:00 – 14:15	Progresses ins Characterization of Microstructures
	Felix Rominski, Polytech GmbH
14:15 – 14:30	Advanced MEMS Manufacturing
	Otto Bobenstetter, EV Group
14:30 – 14:45	MEMS Technologies Dresden - Product Development and Pilot-Fabrication
	Michael Müller,Fraunhofer IPMS
14:45 – 15:00	Enabling Flexible Wafer-Handling Solutions with Dynamic Wafer Calibration and Autocalibration Technology
	Tom Tischner, Moog
15:00 – 15:15	Higher Research Scientist And the Presentation Title is: 3D Measurements of MEMS Internal Structure
	Wenjuan Sun, National Physical Laboratory
15:15 – 15:30	Inspection and Metrology for MEMS with Axiospect 202
	Burkhard Stegemann, HSEB Dresden GmbH
15:30 – 15:45	Reliable MEMS Equipment Solutions for High Volume Production and R&D Environments
	Durga Chaturvedula, Applied Materials GMGH
15:45 – 16:00	Low Coherence Infra Red Interferometer for High Aspect Ratio Via Depth Measurement Gilles Fresquet, Fogale Nanotech
16:00 – 16:15	cmNavigo - Unleash the Power of Manufacturing
	Rui Melo Biscaia, Critical Manufacturing

Note: Speakers and Agenda subject to change.

Price	Valid through 19 September	Beginning 20 September
SEMI Members	free	free
Non-Members	free	free